<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Hello all-</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
We are holding an EBL workshop/short course at Georgia Tech on June 29,30. See BELOW for details. Registration deadline is June 10.</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
This workshop is geared towards BEGINNERS and covers FUNDAMENTALS appropriate for ANYONE even if they use a different EBL model/make than our tool.</div>
<div id="Signature" class="elementToProof">
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Kind regards-</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Devin K. Brown, Ph.D.</div>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Principal Research Engineer</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Institute for Matter and Systems</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Georgia Institute of Technology</span></p>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
------------------------------------------------------------------------------------------------------</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin: 1em 0px; font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);">
Join us for an intensive <b>hands-on Electron Beam Lithography (EBL) Workshop</b> hosted by the
<b>Institute for Matter and Systems (IMS), Georgia Tech</b>. This two-day workshop is designed to provide participants with practical training in high-resolution nanoscale fabrication, covering the complete workflow from pattern design to final device processing.</div>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);"><b>Workshop Highlights:</b><br>
• Pattern design and data preparation using <b>BEAMER</b><br>
• High-resolution exposure on the <b>Elionix ELS-G100 Electron Beam Lithography System</b><br>
• Pattern transfer using advanced etching techniques<br>
• Metal deposition and lift-off processing<br>
• Hands-on cleanroom experience with expert guidance</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);">This workshop offers practical exposure to fabrication
techniques widely used in <b>microelectronics, photonics, MEMS, and quantum device research</b>.</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);"><b>Who Should Attend?</b><br>
Researchers, graduate students, academic users, government researchers, and industry professionals interested in advanced nanoscale fabrication.</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);">📍
<b>Location:</b> Marcus Nanotechnology Building, Georgia Tech<br>
📅 <b>Workshop Dates:</b> </span><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(12, 100, 192);"><b>June 29th–30th,
2026</b></span><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);"><br>
⏳ <b>Registration Deadline:</b> </span><span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(200, 38, 19);"><b>June 10th,
2026</b></span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);"><b>Registration Rates</b> <i>(includes lunch on both days)</i><br>
• Georgia Tech Participants: <b>$200</b><br>
• Academic / Government Participants: <b>$400</b><br>
• Industry Participants: <b>$1000</b></span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin-top: 1em; margin-bottom: 1em;">
<span style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(36, 36, 36);">Register here:
<a href="https://matter-systems.gatech.edu/short-courses-and-workshops" target="_blank" id="OWA4e6a0555-18bb-1dd2-ef31-f10a665c99dd" class="x_OWAAutoLink" title="Original URL: https://matter-systems.gatech.edu/short-courses-and-workshops. Click or tap if you trust this link." rel="noopener noreferrer" originalsrc="https://matter-systems.gatech.edu/short-courses-and-workshops" data-auth="NotApplicable" data-linkindex="0" style="margin: 0px;">
https://matter-systems.gatech.edu/short-courses-and-workshops</a></span></p>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
</div>
</body>
</html>