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Dear colleagues-</div>
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I have been wanting to know the common situation and actual experience for temperature and humidity control for the installed locations of electron beam lithography systems. I've put together the following poll with just a few basic questions. If you would
be so kind to take the poll, it won't take too much time. I would be happy to share the results when finished.</div>
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https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=publish-editor</div>
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Kind regards-</div>
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Devin K. Brown, Ph.D.</div>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Principal Research Engineer</span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Institute for Matter and Systems</span></p>
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<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Georgia Institute of Technology</span></p>
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