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Hi Jeff,</div>
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If its for overlay, you might look at a Suss DSM6/8. If the front to backside alignment is way off, most qualified services guys have a calibration mask to remove any parallax in the BSA scopes.</div>
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Kyle Willis</div>
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Kyle@WECpro.com</div>
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<span style="font-family: Aptos, Aptos_MSFontService, -apple-system, Roboto, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(33, 33, 33);">Get
</span><a href="https://aka.ms/AAb9ysg" style="font-family: Aptos, Aptos_MSFontService, -apple-system, Roboto, Arial, Helvetica, sans-serif; font-size: 12pt;">Outlook for Android</a></div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Jeff McKay <jeffmckay@g.ucla.edu><br>
<b>Sent:</b> Thursday, 02 July 2026 14:16:40<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Backside Alignment Microscopes</font>
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<div dir="auto">Hello All,
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<div dir="auto">We currently use Karl Suss MA6 for lithography on the backside of 4" InP wafers. It is critical that we have good back to front side alignment, and right now we can only use the MA6 to verify alignment. </div>
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<div dir="auto">Unfortunately there is no scale/camera options for outputting to get quantative data from our alignment.</div>
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<div dir="auto">We are looking for a bench top tool/microscope that would allow us to check alignment after development so that we are getting higher resolution and more quantative results. Does anyone have any recommendations?</div>
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<div dir="auto">Thanks,</div>
<div dir="auto">Jeff McKay</div>
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<div dir="auto">Process Engineer</div>
<div dir="auto">Global Communications Semiconductor </div>
<div dir="auto">Torrance, CA</div>
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