<div dir="ltr"><div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">IR camera is our <a href="https://wiki.nanofab.ucsb.edu/wiki/Suss_Aligners_(SUSS_MJB-3)#Backside_Alignment">method of choice for BS alignment verification</a> here, through silicon wafers. Although we've never needed to measure the misalignment, just coarse verification.</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">We found a cheap IR cam that uses a computer monitor to view.</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small"><br></div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">Since you already have an IR camera installed, may I suggest a possible quick-fix to the problem of calibrated measurements using your existing setup:</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">- Buy a Coax splitter and/or Coax-->USB digitizer (don't go ultra cheap or the device will die in <6 mo.). <a href="https://www.amazon.com/s?k=coaxial+to+usb+adapter&channelId=500&clpRedir=Y&plpRedirect=mhFallback">Examples</a>. This will hopefully then have a fixed magnification for every objective on your MA6. Videogamers use this kind of thing for streaming, so there should be options. Hook it up to a cheap laptop (again not <i>too</i> cheap or the laptop can't keep up with the live framerate.)</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">- Use a <a href="https://www.google.com/search?sca_esv=2bd2cc07c427a574&sxsrf=APpeQnv3NA0RGJ6wFFr05l5ixbztmIwhCg:1783120742656&udm=28&fbs=ABfTbFVyMZGZf1hfvX9uKjN_-G8cqCQj_06QnZs315LoFmPf5bBLHMJ0vMQmTbuI72DM7jnxvATrUU2Yg9dwuUGnsUHcA8ltRxGSueAm4xbJB7-U9Vk4K2G3aCoTcvC5pL-W3Bc4wKvyblIDvW9t3J41edOYhCyumrIO3nro7L99GH8kliwMVqQ0hvbksXIL7xFJBI_8mwByDhHJj3T0-O3ElCMyZrfalw&q=microscope+calibration+slide&ved=1t:220175&ictx=111&biw=1142&bih=844&dpr=2.2">microscope calibration slide</a> to calculate µm-per-pixel calibrations for each magnification/objective.</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">- Use something like <a href="https://wiki.nanofab.ucsb.edu/wiki/Measurements_and_Imaging_with_Amscope_Camera_-_Quickstart_Usage_Guide">AMscope software</a>, or <a href="https://imagej.net/software/fiji/">FIJI</a> + <a href="https://wiki.nanofab.ucsb.edu/wiki/FIJI_-_Microscope_Measurement_Tools">Microscope Measurement Tools</a> plugin to apply the calibrated measurements to acquired IR images. (I stopped maintaining Microscope Meas tools a while ago - hopefully someone's newer fork/update works!).</div></div><div><br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4">-- Demis </font><font face="georgia, serif" size="1">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4"><br></font></div></div></div></div><br></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Fri, Jul 3, 2026 at 2:31 PM Jeff McKay <<a href="mailto:jeffmckay@g.ucla.edu">jeffmckay@g.ucla.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div dir="ltr"><div>@Kyle - Thanks for suggestion, but we are looking into more benchtop microscope tools<br></div><div><br></div><div>@Demis - For MA6 verification we have installed a halogen bulb on the bottomside and IR camera installed on topside for verification alignment. It is crude and built into the MA6 system and we are not able to pull images directly from it (cell phone images of the monitor....), we do use splitview and backside/frontside objectives during exposure though.<br></div><div><br></div><div>@Owain - Thanks, we have contacted our Nikon vendor and have encountered some slowness in getting the ball rolling.... Are you able to share any specific model#s for IR cameras and lamps that are attached to your scope?<br></div><div dir="ltr"><br></div><div>Thank you all,</div><div>Jeff</div><div dir="ltr"><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Jul 3, 2026 at 9:31 AM Owain Clark <<a href="mailto:odc1n08@soton.ac.uk" target="_blank">odc1n08@soton.ac.uk</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div>
<div lang="EN-GB">
<div>
<p class="MsoNormal"><span style="font-size:11pt">Hi Jeff, we have been having some success with Nikon microscopes and automated stages (Marzhauser) then scripting NIS-Elements to acquire data. I expect automated data extraction
would be possible from line slice intensity plots. Currently the users have managed to develop automated die grid inspection macros based on some example macros given by Nikon, anyone with a basic level of coding can get stuck in, API is C style syntax. I
just made sure I had bullet proof hardware interlocks to prevent lens collisions in place first as it turned out joystick control of Z bypasses software soft limits, obvious in hindsight as it talks direct to motor controller.
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt">Another nice part of the s/w is that the image stitching (mosaics) works quite well, so if you need high dpi resolution on larger images it’s an easy way – all callable from macros
also. Or put a DS10 camera on and enjoy up to 24MP images per FoV. <u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt">I’m quite happy with this system, people are using it increasingly for automated in line quality steps throughout processing, our enterprise teams like it for the customers that
demand quality inspections of every step.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt">O.
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt"><u></u> <u></u></span></p>
<div>
<div style="border-width:1pt medium medium;border-style:solid none none;border-color:rgb(225,225,225) currentcolor currentcolor;padding:3pt 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11pt;font-family:Calibri,sans-serif">From:</span></b><span lang="EN-US" style="font-size:11pt;font-family:Calibri,sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Jeff McKay<br>
<b>Sent:</b> 02 July 2026 22:17<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Backside Alignment Microscopes<u></u><u></u></span></p>
</div>
</div>
<p class="MsoNormal"><u></u> <u></u></p>
<table border="0" cellspacing="0" cellpadding="0" align="left" width="100%" style="width:100%">
<tbody>
<tr>
<td width="0" style="width:0.3pt;background:rgb(166,166,166);padding:5.25pt 1.5pt">
</td>
<td width="100%" style="background:revert;border:revert;color:revert;direction:revert;display:revert;font-size:revert;height:revert;letter-spacing:revert;line-height:revert;margin:revert;opacity:revert;outline:revert;overflow:revert;padding:revert;table-layout:revert;text-align:revert;text-indent:revert;text-orientation:revert;text-overflow:revert;text-transform:revert;vertical-align:revert;white-space:revert;width:revert;word-break:revert;word-spacing:revert;writing-mode:revert;zoom:revert">
<div>
<p class="MsoNormal">
<span style="font-size:9pt;font-family:"Segoe UI",sans-serif;color:rgb(33,33,33)">You don't often get email from
</span><span style="color:black"><a href="mailto:jeffmckay@g.ucla.edu" target="_blank"><span style="font-size:9pt;font-family:"Segoe UI",sans-serif">jeffmckay@g.ucla.edu</span></a></span><span style="font-size:9pt;font-family:"Segoe UI",sans-serif;color:rgb(33,33,33)">.
</span><span style="color:black"><a href="https://aka.ms/LearnAboutSenderIdentification" target="_blank"><span style="font-size:9pt;font-family:"Segoe UI",sans-serif">Learn why this is important</span></a></span><span style="font-size:9pt;font-family:"Segoe UI",sans-serif;color:rgb(33,33,33)">
<u></u><u></u></span></p>
</div>
</td>
<td width="75" style="background:revert;border:revert;color:revert;direction:revert;display:revert;font-size:revert;height:revert;letter-spacing:revert;line-height:revert;margin:revert;opacity:revert;outline:revert;overflow:revert;padding:revert;table-layout:revert;text-align:revert;text-indent:revert;text-orientation:revert;text-overflow:revert;text-transform:revert;vertical-align:revert;white-space:revert;width:revert;word-break:revert;word-spacing:revert;writing-mode:revert;zoom:revert">
</td>
</tr>
</tbody>
</table>
<div style="border:1pt solid rgb(141,57,112);padding:9pt">
<p class="MsoNormal" style="line-height:16.5pt;background:rgb(247,249,250)"><strong><span style="font-size:10.5pt;font-family:Calibri,sans-serif;color:rgb(141,57,112)">CAUTION:</span></strong><span style="font-size:10.5pt;font-family:Calibri,sans-serif;color:rgb(141,57,112)"> This
e-mail originated outside the University of Southampton. <u></u><u></u></span></p>
</div>
<p class="MsoNormal">Hello All, <u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">We currently use Karl Suss MA6 for lithography on the backside of 4" InP wafers. It is critical that we have good back to front side alignment, and right now we can only use the MA6 to verify alignment. <u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Unfortunately there is no scale/camera options for outputting to get quantative data from our alignment.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">We are looking for a bench top tool/microscope that would allow us to check alignment after development so that we are getting higher resolution and more quantative results. Does anyone have any recommendations?<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Thanks,<u></u><u></u></p>
<p class="MsoNormal">Jeff McKay<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Process Engineer<u></u><u></u></p>
<p class="MsoNormal">Global Communications Semiconductor <u></u><u></u></p>
<p class="MsoNormal">Torrance, CA<u></u><u></u></p>
</div>
</div>
</div></blockquote></div></div>
_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" rel="noreferrer" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br>
</blockquote></div>