<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">
<span style="background-color: rgb(255, 255, 255);">Thanks for the responses so far on EBL environmental control. This is a
<b><u>final request </u></b>for taking a brief poll at the following link. </span></div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">
<span style="background-color: rgb(255, 255, 255);"><br>
</span></div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">
<span style="background-color: rgb(255, 255, 255);"><a href="https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog" target="_blank" id="OWA2520a904-4485-c948-c788-c882391302e9" class="OWAAutoLink" title="https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog" rel="noopener noreferrer" data-auth="NotApplicable" data-linkindex="0" style="margin: 0px; background-color: rgb(255, 255, 255); text-align: left;">https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog</a></span></div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">
<span style="background-color: rgb(255, 255, 255);"><br>
</span></div>
<div id="Signature" class="elementToProof">
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 16px; color: rgb(0, 0, 0);">
<span style="background-color: rgb(255, 255, 255);">I am not sure how many industry subscribers there are to this email list, but there have not been any industry responses yet. If anyone in industry could take the poll, that would be appreciated. You can respond
anonymously.</span></div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Kind regards-</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Devin K. Brown, Ph.D.</div>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Principal Research Engineer</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Institute for Matter and Systems</span></p>
<p class="elementToProof" style="text-align: left; text-indent: 0px; margin-top: 0px; margin-bottom: 0px;">
<span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Georgia Institute of Technology</span></p>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Brown, Devin K <devin.brown@gatech.edu><br>
<b>Sent:</b> Monday, July 6, 2026 10:01 AM<br>
<b>To:</b> Network Fab <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: EBL facility temperature control</font>
<div> </div>
</div>
<style type="text/css" style="display:none">
<!--
p
{margin-top:0;
margin-bottom:0}
-->
</style>
<div dir="ltr">
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Thanks to everyone who has filled out the poll so far, just a reminder for those who have not yet had a chance, if you could fill out the brief poll at the following link it would be much appreciated.</div>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<a href="https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog" id="OWAd84bc389-452a-b58c-7aea-3ef6c75d104e" class="x_OWAAutoLink">https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog</a></div>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Kind regards-</div>
<div id="x_Signature" class="x_elementToProof">
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Devin K. Brown, Ph.D.</div>
<p class="x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Principal Research Engineer</span></p>
<p class="x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Institute for Matter and Systems</span></p>
<p class="x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Georgia Institute of Technology</span></p>
<div class="x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
</div>
<div id="x_appendonsend"></div>
<hr tabindex="-1" style="display:inline-block; width:98%">
<div id="x_divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> Brown, Devin K <devin.brown@gatech.edu><br>
<b>Sent:</b> Tuesday, June 23, 2026 10:14 AM<br>
<b>To:</b> Network Fab <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> EBL facility temperature control</font>
<div> </div>
</div>
<style type="text/css" style="display:none">
<!--
p
{margin-top:0;
margin-bottom:0}
-->
</style>
<div dir="ltr">
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Dear colleagues-</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
I have been wanting to know the common situation and actual experience for temperature and humidity control for the installed locations of electron beam lithography systems. I've put together the following poll with just a few basic questions. If you would
be so kind to take the poll, it won't take too much time. I would be happy to share the results when finished.</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=publish-editor</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Kind regards-</div>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div id="x_x_Signature" class="x_x_elementToProof">
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Devin K. Brown, Ph.D.</div>
<p class="x_x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Principal Research Engineer</span></p>
<p class="x_x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Institute for Matter and Systems</span></p>
<p class="x_x_elementToProof" style="text-align:left; text-indent:0px; margin-top:0px; margin-bottom:0px">
<span style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">Georgia Institute of Technology</span></p>
<div class="x_x_elementToProof" style="font-family:Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
</div>
</div>
</div>
</body>
</html>