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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Hi Labnetwork,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">I am working with an Australia National University spin off that is looking to add a University scale RIE/ICP tool to their new location in Sydney Australia (commute
too far from Canberra) within the next 4 months. New tools seem to have longer lead time at the moment. I’ve done a lot of Cleanroom Design work with many Labnetwork members over the years, but don’t know where they could possibly purchase a mothballed,
excess, or repairable tool, or if anyone out there has a new tool slot that they can’t receive timely….and would trade for a later order slot…. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Have you been seeing etch tool lead times out beyond 6 months?
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Here is a list of the capabilities needed…..<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Wafer Size Capability: up to 200 mm<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Trench profile: 88–90° sidewall<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Sidewall roughness: <10nm<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• CD capability: ≤2µm trench width<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Etch depth: ≥10µm at 1:10 aspect ratio<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Material compatibility: Si, SiO</span><span style="font-size:11.0pt;font-family:"Cambria Math",serif;color:black">₂</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">,
SiNx, Ti (CF</span><span style="font-size:11.0pt;font-family:"Cambria Math",serif;color:black">₄</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">/CHF</span><span style="font-size:11.0pt;font-family:"Cambria Math",serif;color:black">₃</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">
+ O</span><span style="font-size:11.0pt;font-family:"Cambria Math",serif;color:black">₂</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"> chemistry), Al and Cr hard mask<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Process flexibility: Support Bosch, Cryo and ICP-RIE processes<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Etch uniformity: ≤5% across 200mm wafer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• In-situ End Point Detection required<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">• Loading Type: Single wafer manual mode is sufficient, automated batch will be bonus at this stage<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Benchmark platforms include:
<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">1.
</span></b><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">Oxford PlasmaPro 100 Cobra
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">2. ULVAC NLD-570
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">3. SENTECH SI 500C
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black">4. SAMCO RIE-800iPB
<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none"><o:p> </o:p></span></b></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Any recommendations (for these or other tools and sources) are welcome…..and
greatly appreciated. This purchase is well funded. <o:p></o:p></span></b></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Best Regards,
<o:p></o:p></span></b></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Abbie Gregg<br>
</span></b><span style="font-size:11.0pt;line-height:105%;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Chief Technology Officer<br>
Cell: (480) 577-5083<br>
Email: <a href="mailto:agregg@amts.com"><span style="color:black">agregg@amts.com</span></a></span><span style="font-size:11.0pt;line-height:105%;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">
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