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Tom,</div>
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The Cornell Center for Materials Research (CCMR) has a sputter tool with an Ir target and can do reactive sputtering with O2. They also offer contract services to deposit on wafers if the parameters are provided, though I'm not sure about accommodating 150
mm substrates. Steve Kriske (kriske@cornell.edu) is the best person to contact there.</div>
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Sam</div>
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<span style="font-family: "Roobert Light"; color: black;"><b>Samantha Norris, Ph.D.</b></span></p>
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<span style="font-family: "Roobert Light"; font-size: 11pt; color: black;">Product Manager</span></p>
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<span style="font-family: "Roobert Light"; font-size: 11pt; color: black;">Axoft, Inc. |
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Thomas Daunais <tdaunais@hawksemiconductor.com><br>
<b>Sent:</b> Wednesday, August 26, 2026 10:26 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] SIROF deposition</font>
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<div dir="auto">Hello Labnetwork,</div>
<div dir="auto">We are looking for someone who can deposit sputtered iridium oxide films on three to six photoresist-patterned 150 mm substrates. The timing on this project is ~2 months from now. Does anyone in this network have this capability or know of a
vendor who could help us?</div>
<div dir="auto">Thanks!</div>
<div dir="auto">-Tom</div>
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<div dir="ltr"><b>Thomas Daunais, PhD</b></div>
<div dir="ltr">Lead process engineer / Managing Member<br>
<div dir="auto">Hawk Semiconductor LLC</div>
<div><a href="http://hawksemiconductor.com" target="_blank">hawksemiconductor.com</a></div>
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