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<span style="color: rgb(0, 0, 0);">Hi Mike, I would suggest to go with Advanced Energy as they are the original manufacturer for the RF generators in Oxford plasma tools. They would have all spare bits with them. We have also used RF global from Scotland(UK)
in the past for MKS RF generators they are good however if you are based in USA look for local repairs companies as sending old stuff outside USA will require customs and other logistic costs. </span></div>
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Warm Regards</div>
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Rohit Khanna</div>
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Electronic Test & Measurement Engineer</div>
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London Centre for NANO Technology, UCL</div>
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Ph:+44-020-76799984</div>
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Int Ext: 39984</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Mike Maghiar <rmm2263@columbia.edu><br>
<b>Sent:</b> 01 October 2026 19:06<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Oxford PlasmaPro 100</font>
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⚠ Caution: External sender</p>
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<div>Hi all, </div>
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<div>Our PlasmaPro 100 ICP RF unit has failed, and I was wondering if anyone knows a trusted source for repairs like this. </div>
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<div>The unit is deprecated, and the solution available through Oxford is only to purchase a refurbished unit. </div>
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<font color="#3d85c6"><b>Thank you, <br>
Mike Maghiar</b></font>
<div><font color="#3d85c6"><b>CNI Cleanroom Director</b></font></div>
<div><font color="#3d85c6"><b>CEPSR 1020</b></font></div>
<div><font color="#3d85c6"><b>(212) 854-3032</b></font></div>
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