[labnetwork] Questions - Micro/Nano Fabrication text book

[Kevin M Walsh]

Those 2 are excellent texts!  I also suggest the paperback "Intro to Microelectronic Fab" by Jaeger whose new edition has a chapter on MEMS (as does Campbell).  The Campbell MEMS chapter was well-written by Greg Cibuzar.

KW

Dr. Kevin M. Walsh
Professor of Electrical and Computer Engineering
Director of the Lutz and BRB Micro/Nanotechnology Cleanroom
University of Louisville
BRB Building, Room 234
2210 S. Brook St
Louisville, KY 40292
(502) 852-0826 office
(502) 852-8128 fax
walsh at louisville.edu or walsh at ieee.org 
www.mems.louisville.edu 


>>> Joel Pikarsky <joel.pikarsky at mirc.gatech.edu> 3/13/2007 10:08 AM >>>
Hello,

IMNSHO, the best general, introductory text is  "The Science and 
Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. 
Campbell.

You may also want to consider "Fundamentals of Microfabrication: The 
Science of Miniaturization", Second Edition, Marc J. Madou

Make sure you use the second edition for either book.  I prefer 
Campbell, it is more focused on the details of processing.  Madou has 
more of a "general overview' flavor.

Joel Pikarsky
"Scourge of the Cleanroom"

Mike Berman wrote:
> Hello,
> 
> I have 2 questions I would like some help with, first which text book
> is best (or very good) to use for a 200 or 300 level Micro/Nano
> Fabrication class?  The class would be "about" 2 hours a week in a
> class room and 3 hours in lab, for 16 weeks. The push would be for
> MEMS not transistors.
> 
> Other question, do you have a good project (or link) to a project to
> be used for a one week summer class for high school teachers working
> in Micro/Nano?  It would need to be completed in about 12 hours of fab
> time.   The fab has a normal tool set, for dep, photo and etch, but
> not for transistors (doping is a problem).
> 
> Thanks
> 
> Michael Berman
> mberman at ece.arizona.edu 
> 
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