[labnetwork] Questions - Micro/Nano Fabrication text book

[Steve Campbell]

Joel,
  Thank you for your very kind words.  You may be interested to hear that 
the third edition is at the publisher - hopefully it will be out in the 
fall.  My book was really written for the senior/first year grad level and 
it is directed primarily at transistors, although the second and third 
editions include a chapter on MEMS written by Greg Cibuzar.  Lower level 
(tech-level) books include Quirk and Serda, and Xiao.  Both are also written 
for IC manufacturing, not MEMS.  Madou is probably the most widely used MEMS 
book.  You may also want to look at a new book by Saliterman, a friend and 
sort of colleague (Steve is Chief of Surgery at a local hospital as well as 
an Adjunct in our BioEng Dept.).  It focuses on bioMEMS, particularly for 
medical devices.
Steve

----- Original Message ----- 
From: "Joel Pikarsky" <joel.pikarsky at mirc.gatech.edu>
To: <labnetwork at mtl.mit.edu>
Sent: Tuesday, March 13, 2007 9:08 AM
Subject: Re: [labnetwork] Questions - Micro/Nano Fabrication text book


> Hello,
>
> IMNSHO, the best general, introductory text is  "The Science and
> Engineering of Microelectronic Fabrication", 2nd edition, Stephen A.
> Campbell.
>
> You may also want to consider "Fundamentals of Microfabrication: The
> Science of Miniaturization", Second Edition, Marc J. Madou
>
> Make sure you use the second edition for either book.  I prefer
> Campbell, it is more focused on the details of processing.  Madou has
> more of a "general overview' flavor.
>
> Joel Pikarsky
> "Scourge of the Cleanroom"
>
> Mike Berman wrote:
>> Hello,
>>
>> I have 2 questions I would like some help with, first which text book
>> is best (or very good) to use for a 200 or 300 level Micro/Nano
>> Fabrication class?  The class would be "about" 2 hours a week in a
>> class room and 3 hours in lab, for 16 weeks. The push would be for
>> MEMS not transistors.
>>
>> Other question, do you have a good project (or link) to a project to
>> be used for a one week summer class for high school teachers working
>> in Micro/Nano?  It would need to be completed in about 12 hours of fab
>> time.   The fab has a normal tool set, for dep, photo and etch, but
>> not for transistors (doping is a problem).
>>
>> Thanks
>>
>> Michael Berman
>> mberman at ece.arizona.edu
>>
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