[labnetwork] Cadmium Telluride sputtering target exchange problems

[Bob Dutton]

Keith Bradshaw wrote:
>
> We are getting a strong smell from the chamber and instant oxidation 
> and flaking of product deposited on the chimney of our Sputtering 
> system when changing the Cad-Tel target.
>
> What is done to avoid this?
>
> Is this smell harmful?
>
> The flakes are very dark and seem to form when we open the system up 
> to atmosphere. It is load locked so normally it doesn’t see air.
>
> Keith Bradshaw
>
> 972-883-2099
>
> RL 10
>
> University of Texas at Dallas Clean Room
>
> NSERL building
>
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Both Cadmium and Telurium are not good things!
Te can have a smell like garlic (probably one of the
trace elements in garlic anyway). Cadmium was
outlawed many years ago as a car-bumper coating,
again due to toxic properties...
I hope you folks have studied the safety books!
Bob Dutton
Stanford U.