[labnetwork] Fwd: wkyo

[Bernard Alamariu]

Hi,
Attached is the Matlab script to convert the WYKO  test output .opd 
files into the x,y,z matrix data.
WYKO provides it.
Our students use it intensively, for a long time.
===============
I think that if you want to do software automation to analyze the WYKO 
data on the fly it could be
more complicated and slower, than collecting the whole data first, store 
it into the WYKO database
and pass the site files to the Matlab script, etc./ for that last part 
you can develop something indeed.
When you do the WYKO Automatic test on the whole wafer (or large areas), 
I think you should enable
the autofocus capability at each site, to account for the possible wafer 
bow.

Thanks, Bernard


On 7/8/11 2:03 PM, Rungrot Kitsomboonloha wrote:
> Hi,
>
> I would like to joint the list-serv about Wyko support. My problem is 
> about development automatic analysis using matlab code based on Wyko 
> database. I saved wyko file in asc format and have problems getting 
> the right height. Please suggest a correction factor.
>
> Best Regards,
> Jack
>
> -------- Original Message --------
> Subject: 	wkyo
> Date: 	Fri, 08 Jul 2011 08:04:40 -0700
> From: 	Robert M. Hamilton <bob at eecs.berkeley.edu>
> To: 	Rungrot Kitsomboonloha <rungrot at silicon.EECS.Berkeley.EDU>
> CC: 	Bill Flounders <bill at eecs.berkeley.edu>, Evan Stateler 
> <evan at silicon.EECS.Berkeley.EDU>
>
>
>
> Jack,
>
> You may want to join the following list-serv and write about
> your problem to:
> labnetwork at mtl.mit.edu
> I rec'd good feedback about another WYKO issue from this forum.
>
> We also plan to have WYKO service done by this firm. We are
> waiting for Evan to have the time to schedule and meet with
> Tony Dao. He is swamped with are final tool move -
> centura.Tony Dao
>
> Direct Advanced Operations
> 818-288-7908
> 818-998-8162 Fax
> a.dao at directadvop-us.com>
> www.directadvop-us.com
>
>
> Bob H.
>
>
> Robert M. Hamilton
> Marvel NanoLab
> University of CA at Berkeley
> Rm 520 Sutardja Dai Hall
> Berkeley, CA 94720-1754
> bob at eecs.berkeley.edu
> (e-mail preferred)
> 510-809-8600
> 510-325-7557 (Emergencies)
>
>
> On 7/7/2011 4:24 PM, Rungrot Kitsomboonloha wrote:
> >  Hi All,
> >
> >  I am working developing a software to analysis WYKO data. I save wyko data into asc format using Wyko analysis software. The file give me two data sets, OPD and intensity in a format of x,y,z. I am able to extract x and y correctly. But the z values have some wired values. Does anyone have experience with Wyko data structure or know where I can find it? Any suggestions would be nice.
> >
> >  Cheers,
> >  Jack
>
>
> _______________________________________________
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> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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