[labnetwork] hotplate parameters for Shipley 1813

[Nibarger, John]

Here's what one of my colleagues recommends here at NIST:

Dehydration bake ­ 110-120 C  vacuum contact on hot plate for 2 to 5 min.
3-5 min O2 ash at 50W is also a very good option.
 
Soft Bake ­ 95-115 C vacuum contact on hot plate for 45-75 seconds.  This
is really dependent on the aligner and source wavelength used.  Minimum
temp/time process is 95C vacuum contact , 1 min.
 
Hard bake ­ 110-130 C vacuum contact on hot plate for 1-5 min. Temp and
time are driven by the etch resistance need.  Above 130C or with extended
bake times (10+ min) resist stripping becomes a concern.
 
Found this product link that may also be of use.
 
http://www.nanophys.kth.se/nanophys/facilities/nfl/resists/S1813/s1800serie
sDataSheet.pdf

Cheers,
John


John P. Nibarger, Ph.D.
Manager, Boulder Micro-Fabrication Facility
National Institute of Standards and Technology
325 Broadway, MS 817.03
Boulder, CO  80305

303-497-4575 (phone)
303-497-3042 (fax)
john.nibarger at nist.gov






On 8/28/12 10:10 PM, "gary.spinner at mirc.gatech.edu"
<gary.spinner at gmail.com> wrote:

>Hello Dr. Walsh,
>
>The attached file contains processing parameters for Shipley S1800
>series resist.
>
>Thanks,
>
>
>
>On Tue, Aug 28, 2012 at 7:46 PM, Walsh,Kevin M.
><kevin.walsh at louisville.edu> wrote:
>> Processing Experts!
>>
>>
>>
>> What hotplate processing parameters do you recommend for Shipley 1813.
>>We
>> have Brewer Science hotplates capable of hard contact (vacuum),
>>proximity
>> contact (nitrogen cushion), or soft contact (gravity).
>>
>>
>>
>> Dehydration Bake - temp, time, soft/hard/proximity contact?
>>
>> Soft Bake - temp, time, soft/hard/proximity contact?
>>
>> Hard Bake - temp, time, soft/hard/proximity contact?
>>
>>
>>
>> If soft contact, do you use alum foil to keep your hotplate surfaces
>>clean?
>>
>>
>>
>> Thanks in advance,
>> Kevin
>>
>>
>>
>> Dr. Kevin M. Walsh
>> Samuel T. Fife Professor of Electrical and Computer Engineering
>> Founding Director of the UofL Micro/Nanotechnology Center
>> University of Louisville
>> BRB Building, Room 234
>> 2210 S. Brook St
>> Louisville, KY 40292
>> (502) 852-0826 office
>> (502) 852-8128 fax
>> walsh at louisville.edu or walsh at ieee.org
>> www.louisville.edu /micronano
>>
>>
>>
>>
>> _______________________________________________
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>>
>
>
>
>-- 
>Gary Spinner
>Senior Assistant Director of Research Operations
>Institute for Electronics and Nanotechnology
>Georgia Institute of Technology
>Office Number (404) 894-4010
>Cell Phone Number    (404) 391-9182
>
>http://grover.mirc.gatech.edu/
>
>"Successful people are always looking for opportunities to help others.
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