[labnetwork] Question about ITO etching in III-V etcher (GaAs, InP)

weidong zhou weidong001 at hotmail.com
Fri Feb 17 10:51:40 EST 2012


Dear all

Can we etch ITO inside GaAs/InP etching chamber? Any concerns of contamination?

Thanks

Weidong
   		 	   		  
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