[labnetwork] Hydrogen Generation

[Bill Flounders]

Thomas,
While I have had excellent experience with Proton Systems
and recommend an H2 generator to minimize bottle changes,
I know of no requirement to keep H2 in a gas cabinet.
Your local authority may impose a different requirement.

On site hydrogen generation with a PEM strategy rather than
a potassium hydroxide system - in a facility that already has
excess high quality DI water and excess electrical capacity
(as our labs usually do) makes sense. It takes some time to
recover the investment - if it is not being compared to a gas cabinet.

I ask that the discussion address which labs keep H2
in a gas cabinet and why. There are arguments against keeping H2
in a gas cabinet rather than having it open to lab air where the air
changes per hour are significant and offer their own safety.

Bill Flounders
UCBerkeley


Ferraguto, Thomas wrote:
>
> Colleagues,
>
> We're in the process of designing our gas cabinet and abatement layout 
> for our fab.
>
> I just met with the sales representative from Proton and we're looking 
> at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)
>
> I can't find any holes in the argument for Hydrogen generation for 
> ~$12k, when a gas cabinet will cost me ~$20K
>
> Does anyone have any thoughts on this unit or Hydrogen generation in 
> general ? (primarily for PECVD)
>
> Thanks...
>
> Thomas S. Ferraguto
>
> ETIC Clean Room Director
>
> University of Massachusetts Lowell
>
> 600 Suffolk Street 456C
>
> Lowell MA 01854-5120
>
> 978-934-1809 land
>
> 617-755-0910 mobile
>
>
>
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