[labnetwork] Anneal temp for aluminum on silicon with forming gas

[Aebersold,Julia W.]

I wanted to gather some information of aluminum anneal on a silicon wafer performed by other cleanrooms.   We are using 5% forming gas with an anneal temp of  400C for ½ hour with a 20C/min ramp up and ramp down  However, I have also seen higher temps up to 475C, but was concerned about the flammability of 100% hydrogen per its MSDS.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

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