[labnetwork] DEZ compatibility

[Tom Britton]

Hello Yasmin,



Temperature can have an effect on the material compatibility with a given elastomer. Can you tell me what temperature the gas delivery will be at?



It's looking like either PTFE or PCTFE will be the best choices, but we can narrow it down a bit by knowing the temperature.

Best Regards,

Tom Britton
Sales Manager
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct: 208-890-1417
Shop:   877-572-5515

[cid:image002.png at 01CDA528.99BF7A30]

www.criticalsystemsinc.com<http://www.criticalsystemsinc.com/>







-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Yasmin Afsar
Sent: Thursday, October 04, 2012 10:21 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] DEZ compatibility



Dear colleagues,



I am a graduate student at Princeton currently working on a new system for plasma-enhanced atomic layer deposition (PEALD) of ZnO and Al2O3.

We are outsourcing the production of the gas manifold, and we need to supply this company with information about compatibility of our metal-organic precursors with various components in the manifold.



Does anyone know the valve seat material compatibility for DEZ (diethyl zinc) vapor, or what type of seat material is typically used with DEZ? Since our group is new to ALD and to these materials, we really do not know.



Any advice would be much appreciated!



Thank you,

Yasmin





Yasmin Afsar

Graduate Student

Electrical Engineering

Princeton University

yafsar at princeton.edu<mailto:yafsar at princeton.edu>



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