[labnetwork] DEZ compatibility

[Keith Barnes]

Yasmin, please take a look at the attached Presentation. This is a great tool for labs doing WetOx, ALD, and any other processes needing water vapor or other polar chemicals in a safe, vapor, form.

Thank you,

Keith F. Barnes
Sales Representative
SEMITORR
sales distribution service

6336 Patterson Pass Road Suite H
Livermore, CA 94550

tel:   925.667.3607
cell:  925.337.2221
email:  kbarnes at semitorrinc.com 
web:  www.semitorrinc.com



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Yasmin Afsar
Sent: Thursday, October 04, 2012 9:21 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] DEZ compatibility

Dear colleagues,

I am a graduate student at Princeton currently working on a new system for plasma-enhanced atomic layer deposition (PEALD) of ZnO and Al2O3.
We are outsourcing the production of the gas manifold, and we need to supply this company with information about compatibility of our metal-organic precursors with various components in the manifold.

Does anyone know the valve seat material compatibility for DEZ (diethyl zinc) vapor, or what type of seat material is typically used with DEZ? Since our group is new to ALD and to these materials, we really do not know.

Any advice would be much appreciated!

Thank you,
Yasmin


Yasmin Afsar
Graduate Student
Electrical Engineering
Princeton University
yafsar at princeton.edu

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