[labnetwork] TMAH controls or substitutes

[Linda Macks]

Hi all,



We are currently reviewing our processes using TMAH, and I would be grateful for any feedback re. safety controls or substitute chemicals, particularly for Si etching involving 25% concentration TMAH.



Many thanks,



Linda





Dr Linda Macks
Facility Manager, ANFF-NSW
Australian National Fabrication Facility

School of Electrical Engineering & Telecommunications
University of New South Wales
UNSW Sydney NSW 2052
Australia

Phone: +61 (2) 9385 7845
Fax: +61(2) 9385 5114
Email: linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>

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