[labnetwork] question to Cleanroom colleagues: distributed vs. manifolded gases...

[Rizik]

Ian,

 

I usually like to install VMP’s with a minimum of 4- Valve stick where I
populate as many sticks as the installation calls for. However, in aisle or
service chases where you could have more than four (4) tools requiring this
gas, I would install 8-valve stick panels.  The cost of a 4-stick manifold
is negligible compared to the cost of running one new ¼” EP SS316L tubing
from the lateral to a new drop location. Let alone that you will have to
shutdown the gas source and all tools utilizing the gas in question.

 

 

 

Rizik Michael, PE

Principal

Integrated Engineering Services

Office: +408 261 3500, Ext. 201

Cell:      +408 718 0927

www.iesengineering.net

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Ian Harvey
Sent: Thursday, September 20, 2012 8:58 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] question to cleanroom colleagues: distributed vs.
manifolded gases...

 

Dear micro/nano cleanroom colleagues:

 

Please critique the following thought process and give your insight which
approach is best in planning the process gas piping for a new installation.


 

Which do you use (VMP/distributed) in your new facility or new tool
installations and are you happy?

 

If VMP's, what is the threshold number of tools for which you consider it
justifiable to use VMP's?

 

valve manifold panels:

pro's: 

• clean, organized installation, flexible to any future installation,
populated when needed

• system contamination attained by ability to purge regulators with venturi

• leaks or failures within isolated runs do not contaminate other processes
or cause downtime on other tools

• prevent cross-talk between process MFC's, using the same gases

• does not cause system downtime when installing new processes

 

Con's

• up front cost is greater, though not sure how much

 

Process gases distributed through shared supply line, and laterals / drops:

pro's:

• Up front cost is lower (not sure how much-- it depends...)

• cross-talk can be minimized by a regulator at each tool

 

Con's:

• system downtime for all tools sharing the gases during

• cost may be comparable depending upon number of valved drops, and how good
the planning is for predicting future installation points

• see pro's above in VMP

 

Thank you all!

 

--Ian

 

********************************************
Ian R. Harvey, Ph.D.
Research Associate Professor
Department of Mechanical Engineering

Adjunct Associate Professor

Department of Electrical & Computer Engineering
2511 SMBB (USTAR)

Associate Director,

Utah Nanofab & 

Micron Microscopy Core

 

801/585-6162 (voicemail)
801/581-5676 (lab main number)
www.nanofab.utah.edu

mail to:

Utah Nanofab / University of Utah

36 South Wasatch Drive

Suite 2500
Salt Lake City, Utah   84112-9011

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