[labnetwork] How do you dispense photoresist?

[Fouad Karouta]

Hi Caitlin,

 

As well in my previous work at Technical University Eindhoven as well here
at the Australian National University we decant the photoresist in smaller
and simple amber bottles without the drop dispenser. To dispense the resist
our users do use a disposable glass pipette that we only use one time. Prior
to usage I advise to N2-blow the pipette from outside and inside.

 

Hope this would help.

Fouad Karouta

 

*********************************

Facility Manager ANFF ACT Node

Research School of Physics and Engineering

Australian National University

ACT 0200, Canberra, Australia

Tel: + 61 2 6125 7174

Mob: + 61 451 046 412

Email: fouad.karouta at anu.edu.au

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Caitlin Grothaus
Sent: Wednesday, 26 September 2012 3:50 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] How do you dispense photoresist?

 

Hello Everyone,

We're currently re-examining our current method of dispensing photoresist
onto wafers for spinning.  Currently we are decanting larger bottles into
small amber dropper bottles but have had some issues (mainly with resist
drying around the seal of the bottle and causing contamination).

 

What do you use at your lab?  If you do use amber dropper bottles, are there
any steps you take to try to prevent this contamination from happening?

 

Thanks!

Caitlin

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