[labnetwork] Phosphine sources

[Dennis Grimard]

I could not have said it better.  I would add that the cost per cylinder is significant ...

Dennis S Grimard, Ph.D.
Managing Director
Lurie Nanofabrication Facility
1246D EECS Bldg
University of Michigan
Ann Arbor, MI 48103

(734) 368-7172 Cell

On Aug 13, 2013, at 8:44 PM, Bill Flounders <bill at eecs.berkeley.edu> wrote:

> UC Berkeley reviewed sub atmospheric (SA) delivery several years ago.
> While the technology had some specific advantages it had the
> following reservations:
> 1. there was only single supplier of SA cylinders and hence only
> a single supplier of that gas. No competition for cost
> savings - you become a captive customer for that gas.
> 2. The vendor required we purchase and install a specific
> gas cabinet / gas panel to insure protection of their custom
> cylinder with absorbent media. No competition for gas cabinet
> savings - you become captive customer for that gas cabinet
> - and it was relatively expensive.
> 3. Only select pure gases can be provided. Gas mixtures not
> possible due to variable gas desorption rates with gas mixtures.
> Not all pure gases compatible with absorbent media.
> 4. Unclear if authority having jurisdiction (AHJ) will relax
> any containment and detection requirements. You will likely
> still pursue all containment and detection best practices.
> 
> Bill Flounders
> UC Berkeley
> 
> 
> 
> 
> Michael Khbeis wrote:
>> Dear Colleagues,
>> 
>> I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?
>> 
>> Best,
>> 
>> Dr. Michael Khbeis
>> Associate Director
>> Microfabrication Facility (MFF)
>> University of Washington
>> Fluke Hall, Box 352143
>> (O) 206.543.5101
>> (F) 206.221.1681
>> (C) 443.254.5192
>> khbeis at uw.edu
>> http://www.engr.washington.edu/mff/
>> 
>> 
>> 
>> 
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork