[labnetwork] Phosphine sources

[Luciani, Vincent]

Hello,

My colleague Jerry Bowser talked about this project at UGIM 2012.  The abstract and presentation are attached.  Feel free to contact Jerry or I if you have any questions.

Thanks,

Vince

Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886






-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Tuesday, August 13, 2013 5:00 PM
To: labnetwork at mtl.mit.edu Network
Subject: [labnetwork] Phosphine sources

Dear Colleagues, 

I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?

Best,

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
http://www.engr.washington.edu/mff/




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