[labnetwork] BCL3 - Gas Line Heaters and Protocols

[Dean Sutter]

Thanks to all for your responses.

The information will be helpful.

Best regards



On 8/27/2013 6:07 AM, Morrison, Richard H., Jr. wrote:
> Hi,
>
> At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.
>
> Rick
>
>
> Draper Laboratory
> Group Leader Microfabrication Operations
> 555 Technology Square
> Cambridge Ma, 02139-3563
>
> www.draper.com
> rmorrison at draper.com
> W 617-258-3420
> C 508-930-3461
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
> Sent: Monday, August 26, 2013 3:10 PM
> To: <labnetwork at mtl.mit.edu>
> Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
> Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
>
> Hello,
>
> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.
>
> We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.
>
> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.
>
> So, we are seeking a benchmark from existing facilities that use BCL3.
>
> Anyone care to volunteer to explain their installation and operating/safety protocols?
>
> Thanks
>
> --
> Dean A. Sutter
> Associate Director,
> Research Operations and Industry Engagements
>
> dean.sutter at ien.gatech.edu
> 404 894 3847 - Office
> 404 558 1844 - Cell
> www.ien.gatech.edu
>
>
>
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-- 
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu