[labnetwork] BCL3 - Gas Line Heaters and Protocols

[Morrison, Richard H., Jr.]

Hi,

At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Monday, August 26, 2013 3:10 PM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.

We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.

These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and operating/safety protocols?

Thanks

--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu



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