[labnetwork] TEOS supplier

[Morrison, Richard H., Jr.]

Hi Everyone,

I am adding TEOS to my PECVD tool and I am looking for vendor recommendations on TEOS suppliers and the temperature controlled heaters.

Thanks in advance for your help.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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