[labnetwork] TEOS supplier

[Henry Taylor]

Hello Rick,

I recently had to purchase TEOS for my LPCVD system.  We also use it on our
PECVD system.  I purchased mine from National Welders.

Henry


On Mon, Dec 2, 2013 at 9:02 AM, Morrison, Richard H., Jr. <
rmorrison at draper.com> wrote:

>  Hi Everyone,
>
>
>
> I am adding TEOS to my PECVD tool and I am looking for vendor
> recommendations on TEOS suppliers and the temperature controlled heaters.
>
>
>
> Thanks in advance for your help.
>
>
>
> Rick
>
>
>
>
>
> Draper Laboratory
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
>
>
> www.draper.com
>
> rmorrison at draper.com
>
> W 617-258-3420
>
> C 508-930-3461
>
>
>
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>
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