[labnetwork] Tegal 803 Operation Manual

[Parker Gould]

Hello all,

Our group has recently obtained an old Tegal 803 plasma etcher, but
unfortunately it came with very little documentation.  We've been told that
an Operation Manual exists, but our attempts to locate one from several
vendors and from Tegal/SPTS have been fruitless so far.

If anyone knows about a manual for the 803, or know someone who might be
able to locate one, we would greatly appreciate it.

Thank you,
Parker Gould

Schmidt Group Lab
MTL, MIT
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