[labnetwork] Tegal 803 Operation Manual

[Fouad Karouta]

Dear Parker,

 

We have here a Tegal 901e with a manual. If you think this might be of any
help let me know.

Regards, Fouad

 

*********************************

Facility Manager ANFF ACT Node

Research School of Physics and Engineering

Australian National University

ACT 0200, Canberra, Australia

Tel: + 61 2 6125 7174

Mob: + 61 451 046 412

Email: fouad.karouta at anu.edu.au

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Parker Gould
Sent: Wednesday, 6 February 2013 3:54 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Tegal 803 Operation Manual

 

Hello all,

 

Our group has recently obtained an old Tegal 803 plasma etcher, but
unfortunately it came with very little documentation.  We've been told that
an Operation Manual exists, but our attempts to locate one from several
vendors and from Tegal/SPTS have been fruitless so far.  

 

If anyone knows about a manual for the 803, or know someone who might be
able to locate one, we would greatly appreciate it.

 

Thank you,

Parker Gould

 

Schmidt Group Lab

MTL, MIT

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