[labnetwork] Fe in an ALD

[Hathaway, Malcolm]

Hi Warren,

Just an fyi, for you and any other Cambridge Nanotech customers...

Cambridge Nanotech has been acquired by Ultratech, and the plan is to have the "Cambridge Nanotech" division of Ultratech open for business shortly.  We are just down the road from them, and in fact, we have an order pending for some spare parts.

Mac Hathaway
Harvard Center for Nanoscale Systems
Cambridge, MA (USA)
________________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Warren McKenzie [warren.mckenzie.anff at gmail.com]
Sent: Wednesday, January 16, 2013 1:13 AM
To: 'Fab Network'
Subject: [labnetwork] Fe in an ALD

Dear Colleagues,

Does anyone have any experience depositing pure iron in an atomic layer deposition system? Our supplier has been acquired and we are having trouble identifying precursors or recipes.

Our system is a CambridgeNanotech Fiji200.

Regards,
Warren


Dr Warren McKenzie
BE PhD MCom

Business Development Manager - Australian National Fabrication Facility (ANFF).

Level 3 Newton Building
The University of New South Wales
Sydney NSW 2052
AUSTRALIA

Ph: +61 400 059 509
Web: www.anff.org.au<http://www.anff.org.au/>
Email: Warren.McKenzie at anff.org.au<mailto:Warren.McKenzie at unsw.edu.au>

[cid:image001.jpg at 01CDF40C.C625BFC0]