[labnetwork] Fe in an ALD

[J Provine]

we have previously used ferrorcene and O2 then reduced by H2 plasma for
iron ALD.

http://cambridgenanotech.com/papers/atomic%20layer%20deposition%20of%20transition%20metals.pdf


On Tue, Jan 15, 2013 at 10:13 PM, Warren McKenzie <
warren.mckenzie.anff at gmail.com> wrote:

> Dear Colleagues, ****
>
> ** **
>
> Does anyone have any experience depositing pure iron in an atomic layer
> deposition system? Our supplier has been acquired and we are having trouble
> identifying precursors or recipes.****
>
> ** **
>
> Our system is a CambridgeNanotech Fiji200.****
>
> ** **
>
> Regards, ****
>
> Warren****
>
> ** **
>
> ** **
>
> *Dr Warren McKenzie   *
>
> BE PhD MCom****
>
> ** **
>
> Business Development Manager - Australian National Fabrication Facility
> (ANFF).****
>
> ** **
>
> Level 3 Newton Building ****
>
> The University of New South Wales****
>
> Sydney NSW 2052****
>
> AUSTRALIA****
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> ** **
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> Ph: +61 400 059 509****
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> Web: www.anff.org.au****
>
> Email: Warren.McKenzie at anff.org.au <Warren.McKenzie at unsw.edu.au>****
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