[labnetwork] UIUC research group seeking 8" ICP RIE with HBr

[Yi Chen]

Hi All,

We are a UIUC research group currently seeking an ICP RIE able to handle
and process *156 mm x 156 mm SQUARE* (8” round) silicon wafer with *180 -
200 µm* thickness. The ICP RIE has to have an *HBr* gas line.

If any of you has this kind of machine in your facility or knows where we
can find one, please let us know. Any information will be greatly
appreciated.

Thanks,
Yi


-- 
Yi Chen
Department of Electrical and Computer Engineering
3231 Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
208 North Wright Street, MC-249
Urbana, IL 61801-2355 USA
Phone: (217) 979-0200
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