[labnetwork] ambient gas detection for bulkheaded tools

[Dennis Schweiger]

Iulian,

1) Are your tools load locked?

2) Which side of the wall is the process chamber on?

3) Is your cleanroom raised floor, or low side wall, return?

Thanks,

Dennis
586.531.3030 Cell

On Jun 19, 2013, at 4:05 PM, Iulian Codreanu <codreanu at udel.edu> wrote:

> Dear Colleagues,
>
> I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay.  The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area.  What are your thoughts on providing detectors on the bay side of the wall as well?
>
> Thank you very much for your help.
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD Nanofab
> 149 Evans Hall
> Newark, DE 19716
> 302-831-2784
>
>
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