[labnetwork] ambient gas detection for bulkheaded tools

[Iulian Codreanu]

Hi Dennis.

Since I have to purchase the tools I cannot give definite answers on the 
first two questions.

1) I hope that all of them will be loadlocked but I have to allow for 
the possibility that some of them will not be.

2) The chamber could be on either side.

3) Low side wall (12" opening above floor) return.

Thank you for your help.

Iulian

iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784

On 6/19/2013 4:10 PM, Dennis Schweiger wrote:
> Iulian,
>
> 1) Are your tools load locked?
>
> 2) Which side of the wall is the process chamber on?
>
> 3) Is your cleanroom raised floor, or low side wall, return?
>
> Thanks,
>
> Dennis
> 586.531.3030 Cell
>
> On Jun 19, 2013, at 4:05 PM, Iulian Codreanu <codreanu at udel.edu> wrote:
>
>> Dear Colleagues,
>>
>> I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay.  The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area.  What are your thoughts on providing detectors on the bay side of the wall as well?
>>
>> Thank you very much for your help.
>>
>> Iulian
>>
>> --
>> iulian Codreanu, Ph.D.
>> Director of Operations, UD Nanofab
>> 149 Evans Hall
>> Newark, DE 19716
>> 302-831-2784
>>
>>
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