[labnetwork] silane in gas cabinet

[Shawn Wagoner]

Hello,

                Here in my lab we have a PECVD system that uses 2%silane in
argon.  The cylinder is in a cabinet in the service chase.  The silane
shares this cabinet with a bottle of ammonia.  The cabinet is connected to
the general exhaust that is used throughout the lab.  I don't really like
the setup but this is how the system was running when I was hired and came
to the university.  This setup is different from my industrial experience
where the silane was outdoors in a bunker. 

 

The lab will be moving to a larger cleanroom space.   While I will not have
an outdoor bunker at the new facility, I will take this opportunity to
improve the situation.   I intend to purchase a new cabinet for the 2%silane
that will allow me to use a cylinder with a pneumatic valve, DISS fitting
and a dedicated purge cylinder.  This is more in line with my prior
experience.    Are there any concerns or issues with connecting the cabinet
to the common exhaust?  Again this new lab only has general exhaust that
runs throughout the entire lab.  

 

Thanks

Shawn Wagoner

 

 

Shawn Wagoner

Director

Nanofabrication Laboratory at Binghamton University

607-777-6131

 

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