[labnetwork] silane in gas cabinet

[Aebersold,Julia W.]

Shawn, our facility runs a completely separate Silane exhaust line that is not connected in any manner with our independent acids or solvent exhaust systems.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shawn Wagoner
Sent: Thursday, June 27, 2013 2:40 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] silane in gas cabinet

Hello,
                Here in my lab we have a PECVD system that uses 2%silane in argon.  The cylinder is in a cabinet in the service chase.  The silane shares this cabinet with a bottle of ammonia.  The cabinet is connected to the general exhaust that is used throughout the lab.  I don't really like the setup but this is how the system was running when I was hired and came to the university.  This setup is different from my industrial experience where the silane was outdoors in a bunker.

The lab will be moving to a larger cleanroom space.   While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation.   I intend to purchase a new cabinet for the 2%silane that will allow me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder.  This is more in line with my prior experience.    Are there any concerns or issues with connecting the cabinet to the common exhaust?  Again this new lab only has general exhaust that runs throughout the entire lab.

Thanks
Shawn Wagoner


Shawn Wagoner
Director
Nanofabrication Laboratory at Binghamton University
607-777-6131

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