[labnetwork] ALD survey

[Lynn Rathbun]

Karl

You can find a database of the tools available at 
the NNIN sites on the NNIN web 
site.http://www.nnin.org/research-support/tools-database
You can also find a spreadsheet of processes and 
tools available at this process blog entry.
http://www.nnin.org/research-support/process-blog/nnin-ald-processes-and-nnin-ald-workshop

At Cornell, we are quite happy with our Oxford FlexAl but it is a big system.


>Hello Labnetwork,
>
>We are currently searching for an ALD system 
>that has the flexibility to meet the needs of 
>multiple users, but is on the lower end of 
>pricing.  I realize that these attributes are 
>typically not well aligned, however we have 
>limited internal funding support.  I have been 
>exploring ALD systems offered by a number of 
>vendors.  There are a few systems that appear to 
>be good candidates – some are upgradable to 
>offer enhanced capabilities, while others are 
>not.  We are targeting a system that can 
>accommodate up to 6-inch substrates, and is in 
>the < $200K price range.  Initial films of 
>interest are Al2O3, HfO2 and ZnO. however we 
>expect interest in other applications.
>
>I have been searching websites, and I have found 
>several of these systems placed in university 
>labs.  I would like to ask these universities 
>for their opinion of the system they have, and 
>some of the details that went into their 
>decision on the system they have over the other 
>systems in the market.  If there is a survey 
>available for these systems, perhaps prepared 
>for a proposal, this would be especially useful.
>
>Thanks for the help!
>
>
>Dr. Karl D. Hirschman, Micron Professor
>Electrical and Microelectronic Engineering Department
>Director, Semiconductor & Microsystems Fabrication Laboratory
>Rochester Institute of Technology
>82 Lomb Memorial Drive
>Rochester, NY  14623-5604
>PH: 585-475-5130
>FAX: 585-475-5041
><mailto:kdhemc at rit.edu>kdhemc at rit.edu
>http://smfl.microe.rit.edu
>
>
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**************************************************************
Dr. Lynn Rathbun                                        Rathbun at cnf.cornell.edu
NNIN  Deputy Director                   (607)-254-4872
CNF Laboratory Manager
Duffield Hall                                                (607)-255-8601 Fax
Cornell 
University                                       (607)-592-1549 Work Cell
Ithaca, New York 14853                     (607)-342-1880 Personal Cell




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