[labnetwork] Question regarding SF6 intermediate gas delivery line pressures

[Rizik]

Hi Bob,

My experience is that the discharge pressure from a remote gas cylinder
within is between 80 to 100 psi. At the VMB you can reduce it to the desired
pressure required to supply the MFC in the tools gas manifold box. In most
cases it is about 30 psig.

Rizik Michael, PE
Principal
Integrated Engineering Services
Office: +408 261 3500, Ext. 201
Cell:      +408 718 0927



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Robert M. Hamilton
Sent: Thursday, March 07, 2013 9:50 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Question regarding SF6 intermediate gas delivery line
pressures

Colleagues,

What is the preferred line pressure for delivering SF6 from a gas vault to a
valve-manifold box?

The SF6 cylinder pressure in our indoor cylinder vault is
~320 psi. The final delivery pressure is ~18-22 psi. There is a cylinder
regulator at the cylinders as well as line pressure regulators in the VMB.
Our delivery volume varies from ~100 sccm to 1.5 slpm.

Thanks for any enlightenment,
Bob Hamilton


--
Bob Hamilton
Marvel NanoLab
University of CA at Berkeley
Rm 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
(e-mail preferred)
510-809-8600
510-325-7557 (mobile - emergencies)


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