[labnetwork] Query regarding ICPRIE system-IIT Bombay_India

[Satyavalli Paluri]

Hello ,

We have a Sentech ICPRIE system. BCl3 gas line is connected to it for
etching purpose. We are facing a problem while evacuating the line
sometimes. It takes longer time than normal for evacuation.
Can someone please advise.


Thanks & regards
Valli

-- 
Assistant Lab Manager,
CEN, Electrical Engg Dept, Annexe,
IIT Bombay, Mumbai, Powai- 400076
Tel No. 02225764435/09820856337(M)






>
>
> ---------------------------- Original Message ----------------------------
> Subject: Re: [labnetwork] Toxic Gas Monitoring Systems
> From:    "Fouad Karouta" <fouad.karouta at anu.edu.au>
> Date:    Thu, August 9, 2012 5:15 am
> To:      "'Bowser, Jerry'" <jerry.bowser at nist.gov>
>          labnetwork at mtl.mit.edu
> --------------------------------------------------------------------------
>
> Hi Jerry,
>
>
>
> At our facility we have gas monitoring using sensors from Bionics (Cl2,
> BCl3, SiH4, NH3, flammables). All sensors are monitored by a home built
> monitoring cabinet based on a quite flexible software that we kept
> adapting
> to meet our needs. All sensors have two levels of alarm:
>
> 1-      Alarm 1: just give a warning at the local level (monitoring
> cabinet)
>
> 2-      Alarm 2: here we differentiate between sensors in open area
> towards
> sensors in exhaust ducting. The open lab sensors will trigger a general
> alarm: sirens, shutting down all gases, evacuation and alert fire Dept;
> while the exhaust detectors will initiate shutting down the corresponding
> gas and the system using it, shutting the exhaust fan plus a local alarm
> at
> the monitoring cabinet level/lab.
>
>
>
> Before taking my actual position in Australia I worked at Technical
> University Eindhoven where an 800m2 clean room was built in 2000-2002 with
> also Bionics sensors used to monitor gases like AsH3, PH3, SiH4, NH3, Cl2,
> flammables. Bionics did deliver a complete system with the interfacing
> computer that controls all sensors.
>
>
>
> We get the sensors calibrated twice by representatives of Bionics in
> Australia.
>
>
>
> Kind regards,
>
> Fouad Karouta
>
>
>
> *********************************
>
> Facility Manager ANFF ACT Node
>
> Research School of Physics and Engineering
>
> Australian National University
>
> ACT 0200, Canberra, Australia
>
> Tel: + 61 2 6125 7174
>
> Mob: + 61 451 046 412
>
> Email: fouad.karouta at anu.edu.au
>
>
>
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Bowser, Jerry
> Sent: Thursday, 9 August 2012 3:14 AM
> To: 'labnetwork at mtl.mit.edu'
> Subject: [labnetwork] Toxic Gas Monitoring Systems
>
>
>
> Hello All,
>
>
>
> I wanted to survey the group for information regarding the type and brands
> of toxic gas monitoring control systems in use.
>
>
>
> Here at the CNST, we use various gas sensors (about 55) connected to a
> custom PLC based system that is just about at capacity.  If a gas is
> detected, the system shuts down gas cabinets, sounds alarms, and alerts
> our
> fire department.  The major shortfall of the system is that the detection
> level can be read at the sensor in the detection zone but is not displayed
> at the control interface.
>
>
>
> Before we decide on upgrading or replacing our control system, I thought I
> would see what others are currently using.  Thanks for your input.
>
>
>
> Jerry
>
>
>
>
>
>
>
> *******************************************
>
> Jerry Bowser
>
> NanoFab Operations Group
>
> Center for Nanoscale Science and Technology
>
> National Institute of Standards and Technology
>
> Phone: (301) 975-8187
>
>
>
> _______________________________________________
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>
>
> --
>




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