[labnetwork] Query regarding ICPRIE system-IIT Bombay_India

[Olona, Leonard E.]

Valli,

A quick check of the following...

What is your gas cylinder change out procedure?  Do you employ several pump purge cycles?   What is your purge gas?   BCL3 has a tendency to get "sticky and gooey" if exposed to atmosphere.

We like to purge with UHP N2 and He mixture.  This will allow for leak checking the gas cabinet as well.

Other items to consider... If there was a leak in the gas delivery/jungle,  residue would be present inside the gas lines.  That could be a culprit for slow evacuation.   

These are are just a couple of high level thoughts.  Without seeing your SOP its hard to say.

Can you provide and other particulars?

Do you have an excess flow valve that could be hanging up?

Thank you,
Len

Leonard Olona
Cleanroom Manager
University of Oklahoma
110 West Boyd
Norman, Oklahoma
73019
Desk (405) 325-4374
Cell.  (405) 630-9068
Len.olona at ou.edu



On Mar 25, 2013, at 5:28 PM, "Satyavalli Paluri" <valli at ee.iitb.ac.in> wrote:

> 
> Hello ,
> 
> We have a Sentech ICPRIE system. BCl3 gas line is connected to it for
> etching purpose. We are facing a problem while evacuating the line
> sometimes. It takes longer time than normal for evacuation.
> Can someone please advise.
> 
> 
> Thanks & regards
> Valli
> 
> -- 
> Assistant Lab Manager,
> CEN, Electrical Engg Dept, Annexe,
> IIT Bombay, Mumbai, Powai- 400076
> Tel No. 02225764435/09820856337(M)
> 
> 
> 
> 
> 
> 
>> 
>> 
>> ---------------------------- Original Message ----------------------------
>> Subject: Re: [labnetwork] Toxic Gas Monitoring Systems
>> From:    "Fouad Karouta" <fouad.karouta at anu.edu.au>
>> Date:    Thu, August 9, 2012 5:15 am
>> To:      "'Bowser, Jerry'" <jerry.bowser at nist.gov>
>>         labnetwork at mtl.mit.edu
>> --------------------------------------------------------------------------
>> 
>> Hi Jerry,
>> 
>> 
>> 
>> At our facility we have gas monitoring using sensors from Bionics (Cl2,
>> BCl3, SiH4, NH3, flammables). All sensors are monitored by a home built
>> monitoring cabinet based on a quite flexible software that we kept
>> adapting
>> to meet our needs. All sensors have two levels of alarm:
>> 
>> 1-      Alarm 1: just give a warning at the local level (monitoring
>> cabinet)
>> 
>> 2-      Alarm 2: here we differentiate between sensors in open area
>> towards
>> sensors in exhaust ducting. The open lab sensors will trigger a general
>> alarm: sirens, shutting down all gases, evacuation and alert fire Dept;
>> while the exhaust detectors will initiate shutting down the corresponding
>> gas and the system using it, shutting the exhaust fan plus a local alarm
>> at
>> the monitoring cabinet level/lab.
>> 
>> 
>> 
>> Before taking my actual position in Australia I worked at Technical
>> University Eindhoven where an 800m2 clean room was built in 2000-2002 with
>> also Bionics sensors used to monitor gases like AsH3, PH3, SiH4, NH3, Cl2,
>> flammables. Bionics did deliver a complete system with the interfacing
>> computer that controls all sensors.
>> 
>> 
>> 
>> We get the sensors calibrated twice by representatives of Bionics in
>> Australia.
>> 
>> 
>> 
>> Kind regards,
>> 
>> Fouad Karouta
>> 
>> 
>> 
>> *********************************
>> 
>> Facility Manager ANFF ACT Node
>> 
>> Research School of Physics and Engineering
>> 
>> Australian National University
>> 
>> ACT 0200, Canberra, Australia
>> 
>> Tel: + 61 2 6125 7174
>> 
>> Mob: + 61 451 046 412
>> 
>> Email: fouad.karouta at anu.edu.au
>> 
>> 
>> 
>> From: labnetwork-bounces at mtl.mit.edu
>> [mailto:labnetwork-bounces at mtl.mit.edu]
>> On Behalf Of Bowser, Jerry
>> Sent: Thursday, 9 August 2012 3:14 AM
>> To: 'labnetwork at mtl.mit.edu'
>> Subject: [labnetwork] Toxic Gas Monitoring Systems
>> 
>> 
>> 
>> Hello All,
>> 
>> 
>> 
>> I wanted to survey the group for information regarding the type and brands
>> of toxic gas monitoring control systems in use.
>> 
>> 
>> 
>> Here at the CNST, we use various gas sensors (about 55) connected to a
>> custom PLC based system that is just about at capacity.  If a gas is
>> detected, the system shuts down gas cabinets, sounds alarms, and alerts
>> our
>> fire department.  The major shortfall of the system is that the detection
>> level can be read at the sensor in the detection zone but is not displayed
>> at the control interface.
>> 
>> 
>> 
>> Before we decide on upgrading or replacing our control system, I thought I
>> would see what others are currently using.  Thanks for your input.
>> 
>> 
>> 
>> Jerry
>> 
>> 
>> 
>> 
>> 
>> 
>> 
>> *******************************************
>> 
>> Jerry Bowser
>> 
>> NanoFab Operations Group
>> 
>> Center for Nanoscale Science and Technology
>> 
>> National Institute of Standards and Technology
>> 
>> Phone: (301) 975-8187
>> 
>> 
>> 
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>> 
>> 
>> --
> 
> 
> 
> 
> -- 
> 
> 
> 
> 
> 
> 
> 
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