[labnetwork] Query regarding ICPRIE system-IIT Bombay_India

[Goodman, James R]

Valli,

Depending on the temperature and pressure in your gas cabinet it is possible to have liquid in the pig tail, regulator, or delivery line. This could cause unpredictable pump down times. Since I do not know your specific cabinet design and configuration this is only a suggestion on my part.

Jay.

James Goodman
Equipment Manager, Saab/ETIC Nanofabrication Laboratory
University of Massachusetts, Lowell
40 University Ave.
Room 121
Lowell, MA -01854
Office (978) 934-3469
Cell (603) 235-1496

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Satyavalli Paluri
Sent: Monday, March 25, 2013 8:49 AM
To: labnetwork at mtl.mit.edu
Cc: xandeeps at gmail.com; vanaparthy at ee.iitb.ac.in; Hemant Ghadi
Subject: [labnetwork] Query regarding ICPRIE system-IIT Bombay_India


Hello ,

We have a Sentech ICPRIE system. BCl3 gas line is connected to it for etching purpose. We are facing a problem while evacuating the line sometimes. It takes longer time than normal for evacuation.
Can someone please advise.


Thanks & regards
Valli

--
Assistant Lab Manager,
CEN, Electrical Engg Dept, Annexe,
IIT Bombay, Mumbai, Powai- 400076
Tel No. 02225764435/09820856337(M)






>
>
> ---------------------------- Original Message ----------------------------
> Subject: Re: [labnetwork] Toxic Gas Monitoring Systems
> From:    "Fouad Karouta" <fouad.karouta at anu.edu.au>
> Date:    Thu, August 9, 2012 5:15 am
> To:      "'Bowser, Jerry'" <jerry.bowser at nist.gov>
>          labnetwork at mtl.mit.edu
> --------------------------------------------------------------------------
>
> Hi Jerry,
>
>
>
> At our facility we have gas monitoring using sensors from Bionics (Cl2,
> BCl3, SiH4, NH3, flammables). All sensors are monitored by a home built
> monitoring cabinet based on a quite flexible software that we kept
> adapting
> to meet our needs. All sensors have two levels of alarm:
>
> 1-      Alarm 1: just give a warning at the local level (monitoring
> cabinet)
>
> 2-      Alarm 2: here we differentiate between sensors in open area
> towards
> sensors in exhaust ducting. The open lab sensors will trigger a general
> alarm: sirens, shutting down all gases, evacuation and alert fire Dept;
> while the exhaust detectors will initiate shutting down the corresponding
> gas and the system using it, shutting the exhaust fan plus a local alarm
> at
> the monitoring cabinet level/lab.
>
>
>
> Before taking my actual position in Australia I worked at Technical
> University Eindhoven where an 800m2 clean room was built in 2000-2002 with
> also Bionics sensors used to monitor gases like AsH3, PH3, SiH4, NH3, Cl2,
> flammables. Bionics did deliver a complete system with the interfacing
> computer that controls all sensors.
>
>
>
> We get the sensors calibrated twice by representatives of Bionics in
> Australia.
>
>
>
> Kind regards,
>
> Fouad Karouta
>
>
>
> *********************************
>
> Facility Manager ANFF ACT Node
>
> Research School of Physics and Engineering
>
> Australian National University
>
> ACT 0200, Canberra, Australia
>
> Tel: + 61 2 6125 7174
>
> Mob: + 61 451 046 412
>
> Email: fouad.karouta at anu.edu.au
>
>
>
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Bowser, Jerry
> Sent: Thursday, 9 August 2012 3:14 AM
> To: 'labnetwork at mtl.mit.edu'
> Subject: [labnetwork] Toxic Gas Monitoring Systems
>
>
>
> Hello All,
>
>
>
> I wanted to survey the group for information regarding the type and brands
> of toxic gas monitoring control systems in use.
>
>
>
> Here at the CNST, we use various gas sensors (about 55) connected to a
> custom PLC based system that is just about at capacity.  If a gas is
> detected, the system shuts down gas cabinets, sounds alarms, and alerts
> our
> fire department.  The major shortfall of the system is that the detection
> level can be read at the sensor in the detection zone but is not displayed
> at the control interface.
>
>
>
> Before we decide on upgrading or replacing our control system, I thought I
> would see what others are currently using.  Thanks for your input.
>
>
>
> Jerry
>
>
>
>
>
>
>
> *******************************************
>
> Jerry Bowser
>
> NanoFab Operations Group
>
> Center for Nanoscale Science and Technology
>
> National Institute of Standards and Technology
>
> Phone: (301) 975-8187
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
> --
>




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