[labnetwork] ASE alumina chamber clean procedure

[Alan Seabaugh]

I have seen this happen with Pt on several occasions.   Nanoparticles of Pt appear to catalyze the combustion of IPA.  This happened in just the way you described.  I have also seen the IPA soaked texwipe ignite in my student's hand on wiping out an evaporation chamber after a Pt evaporation.  This has not happened with any other metal.

Regards, Alan Seabaugh

On May 6, 2013, at 2:59 PM, Errol V. Porter wrote:

Greetings,

I am cleaning an alumina cylinder from an STS (now STPS) advanced silicon etcher and looking for advice on the proper procedure to remove the interior coating. I remember the OEM indicating only a CO2 blast cleaning is needed. I have a reputable vendor indicating a bead-blast, chemical clean, detail and bake is needed to properly condition the part. Has anyone else had to clean an STS ASE alumina chamber before and if so, what procedure/vendor did you use to properly clean the cylinder?

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. (479) 575-2519
Mobile: (479) 236-0693
Fax (479) 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu<http://www.hidec.uark.edu/>

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Alan Seabaugh
Professor of Electrical Engineering
Director, Center for Low Energy Systems Technology (LEAST)
Department of Electrical Engineering, University of Notre Dame
230A Fitzpatrick Hall, Notre Dame, IN  46556-5637
574 631-4473 (office)

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