[labnetwork] ZnS sputtering

Fri May 10 08:00:12 EDT 2013

That will most likely contaminate your system. It is also tricky to sputter as the Zn and S may disassociate. I would think that the target would be a powder press target, if so you will need to be very careful with heat generation. If the target gets hot it will crack and even spray particles over the machine.

I would not allow ZnS in a general use machine, too much risk to other users.

Rick

Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of raghavan
Sent: Friday, May 10, 2013 1:53 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ZnS sputtering

Dear all
We have a request from a tool user to sputter ZnS in our sputter tool. Our sputter tool is a share tool used by many users. I would like to know from experienced users if ZnS sputtering needs any extra precautions to be taken? Does it contaminate the chamber?
Thank you
Best wishes
Raghavan

*************************************************
Dr.Vijayaraghavan
Technology Manager
National Nanofabrication Centre
Centre for Nano Science and Engineering
Indian institute of Science ( IISc)
Bangalore - 560 012
India
Ph: 09663304316
http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome
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