[labnetwork] ALD vacuum pump oil

[Michael Call]

We have a thermal ALD system that has an Alcatel 2063C2 pump with Anderol
555(A155) oil for fluid(no turbo).  We recently cleaned the system and
noticed oil in the low points in the chamber. Has anyone else had any
experience with this oil?  The vapor pressure for the oil is 10^-3
mBar at 100Cwhich is fairly high.

-- 
Mike Call
Research Engineer
UMaine LASST
207-581-3382
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