[labnetwork] ALD vacuum pump oil

[Mac Hathaway]

Hi Mike,

This is Mac Hathaway at Harvard.  I'm not familiar with that oil, but we 
use Fomblin-type "O2 Service" oil.  What is the make of your ALD 
system?  Does it use a constant N2 or Ar purge?  If not, I can easily 
imagine a fair amount of backstreaming over time.  In our Cambridge 
Nanotech (Ultratech, now) Savannah, we run 20 sccm of N2 all the time.

Also, if yours is a shared use facility, never discount the possibility 
of strange things being introduced into the chamber by "less 
experienced" users...


Mac


On 10/23/2013 3:13 PM, Michael Call wrote:
> We have a thermal ALD system that has an Alcatel 2063C2 pump with 
> Anderol 555(A155) oil for fluid(no turbo).  We recently cleaned the 
> system and noticed oil in the low points in the chamber. Has anyone 
> else had any experience with this oil?  The vapor pressure for the oil 
> is 10^-3 mBar at 100C which is fairly high.
>
> -- 
> Mike Call
> Research Engineer
> UMaine LASST
> 207-581-3382
>
>
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