[labnetwork] LPCVD SiC

[Morrison, Richard H., Jr.]

Hi All,

I am planning a retro fit of our LPCVD stack, I want to remove LTO and replace with SiC. We have methane in the fab for our PECVD SiC process can I use that on an LPCVD process or is another feed gas better suited to SiC process?

Thanks in Advance.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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