[labnetwork] 300 mm wafer coating capability

Ferraguto, Thomas Thomas_Ferraguto at uml.edu
Tue Apr 29 15:07:41 EDT 2014


I have a customer that's looking for coating (spin coating) capability for 300mm wafers.

Does anyone have a resource they could offer or recommend

Best Regards


Thomas S. Ferraguto
ETIC Nanofabrication Laboratory Director
University of Massachusetts Lowell
1 University Avenue
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile
978-934-1014 fax
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