[labnetwork] Brand recommandation

[J Provine]

Hello,
at stanford's snf we have multiple systems from cambridge nanotech (now a
division of ultratech).  we've had a thermal ald system (Savannah) for
several years.  it is low maintenance and high uptime with great metal
oxide performance.  we also have their plasma assisted system (Fiji) which
is able to do much more and delivers amazing nitride and pure metal films
in addition to metal oxides.  it is also high up time, although it is by
nature a little more complicated.  fall 2013, cambridge nanotech released a
second generation of the savannah and the fiji with some changes that (in
my opinion) make them nicer for shared use labs.

these are very popular tools at snf, and we've gotten great support from
cambridge nanotech.

i could not recommend our brand of wafer saw.
j


On Fri, Jan 10, 2014 at 12:50 PM, Aebersold,Julia W. <
julia.aebersold at louisville.edu> wrote:

> We have a lovely Beneq ALD that is very nice and a Disco Dicing Saw.
>
> Cheers!
>
> Julia Aebersold, Ph.D.
> MNTC Cleanroom Manager
> Shumaker Research Building, Room 233
> 2210 South Brook Street
> University of Louisville
> Louisville, KY  40292
>
> 502-852-1572
> http://louisville.edu/micronano/
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
> Sent: Friday, January 10, 2014 7:25 AM
> To: Matthieu Nannini, Dr.; labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Brand recommandation
>
> We purchased and have been operating a nice little R&D ALD tool from a
> company in Sudbury Mass called Arradiance  unit is a GEMSTAR-8.
>
> A little caution here every 10um of deposition you have to clean the
> chamber by bead blasting and the source chemicals are expensive but overall
> it is 95% up time and the process is very stable.
>
> We have Disco dice saw the latest model and it is very good, model is DAD
> 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both
> saws have >95% uptime with good service from both companies.
>
>
> Rick
>
>
> Draper Laboratory
> Principle Memeber of the Technical Staff Group Leader Microfabrication
> Operations
> 555 Technology Square
> Cambridge Ma, 02139-3563
>
> www.draper.com
> rmorrison at draper.com
> W 617-258-3420
> C 508-930-3461
>
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr.
> Sent: Tuesday, January 07, 2014 4:38 PM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Brand recommandation
>
> Dear colleagues,
>
> We received money to buy new tools in 2014 and, before you all get too
> busy in 2014, I would like to get your input (brand of choice) for the
> followings:
> - dicing saw
> - ICP for F processes
> - ALD
> - Laser direct writer
> - Developing station
>
> Thanks in advance
>
> Matthieu Nannini
> McGill Nanotools Microfab
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