[labnetwork] Precautions for the inspection and handling of used semiconductor manufacturing equipment ?

[Stephen Howe]

Dear Lab Network members,

I would be interested in getting the network's suggestions regarding the
following topic.

As the owner and founder of Fabsurplus.com, a broker and reseller of
used semiconductor manufacturing equipment, I spend around half of my
time inspecting a wide selection of process equipment that has been in
contact with a very wide range of chemicals.

The machines inspected include CVD and PVD equipment, solvent and acid
wet benches, pumps, implant equipment and lithography equipment.

The equipment is typically "decontaminated" before we get to it.
Sometimes, we get a decontamination certificate and MSDS sheets with the
tool. This is very frequently a legal obligation prior to removal of the
equipment from the factory.

The precautions I adopt during inspection are:-

1. Check for presence of decontamination certificates and MSDS.
2. Wear some kind of disposable protective gloves during the inspection.
3. Remain aware of the potentially hazardous nature of any residues or
fluids encountered during equipment inspections.
4. In the case any fluid is found, I check the pH of the fluid using
indicator paper.
In the case the indicator paper shows acid, decontamination procedures
are followed.
5. Following inspection, gloves are removed and disposed of , and then I
am always careful to thoroughly wash my hands.

I would further comment that I have discovered around a pint of
concentrated HF remaining in the machines I was inspecting on 2
occasions in the last 15 years, and other acids on one occasion.

I am also concerned that HF may leach into the plastic of the equipment
we come into contact with.
Furthermore, we are now exposed to a new hazard from possible residual
gases from excimer lasers used in photolithography.

I have noted that in the event of leaks of HF occuring during the
machine's use, the steel surfaces of the machines in question -
typically inside the gas boxes, chamber outer parts - can have a floured
or stained appearance.
I wonder if lab network members can advise on any precautions necessary
for the handling and decontamination of such discolored or floured
surfaces ?

I often travel around the world to do equipment inspections, and end up
doing the inspections armed with a flashlight in a warehouse.
Very often the warehouses were I do the inspection have no first aid kit
for the treatment of HF exposure and also no kit for the detection and
cleanup of acid spills.

As such I was thinking of carrying with me a small , emergency kit.
In that kit I was thinking of including:-

1. Litmus paper
2. HF paper
3. A tube of Calcium Gluconate Gel
4. Disposable overalls
5. Gloves suitable for applying the Calcium Gluconate gel to any
exposure sufferer.

I need to get though airport security and customs with the minimum of
fuss.

Given the extremely wide assortment of machines we at Fabsurplus.com
inspect, can anyone suggest items I could do with in my "emergency
kit" ?
Can anyone suggest quantities of the items I am going to be able to get
through airport security without having a huge hassle ?
Can anyone suggest any procedures or experiences which might help me get
a kit like this through international customs and airport security with
the minimum of fuss?

Thanks very much in anticipation for your responses.

Yours sincerely,

Stephen Howe 
Company Owner
SDI Fabsurplus Group

 +1 830 388 1071 (Mobile)
+39 335 710 7756 (Italy Mobile)
Skype: Stephencshowe
email: info at fabsurplus.com

WWW.FABSURPLUS.COM
Japan-Italy-Ireland-USA

Facebook: www.facebook.com/fabsurplus
Twitter: http://twitter.com/fabsurplus
Google+: https://plus.google.com/+Fabsurplus

Japan-Italy-Ireland-USA