[labnetwork] Precautions for the inspection and handling of used semiconductor manufacturing equipment ?

[John Shott]

Stephen:

First my disclaimer:  I am not a health and safety professional, but 
have received donated equipment over the years:  some of which have been 
carefully decontaminated ... whereas other look as if they were simply 
removed by cutting every line to the tool.

Here are a few things that I would offer:

1. I would get a better set of gloves and probably more than one type.  
It sounds as if you are using simple disposable or latex gloves.  
Certainly something at bit more robust such as Trionic gloves would 
provide better protection against exposure for a variety of acids.  
Someone (I forget who) at UGIM was describing some lightweight Trionic 
gloves that they liked ... I think that it may have been either the MIT 
or Harvard EH&S folks who spoke during the Sunday introductory session 
on safety.  You probably also want something like nitrile gloves that 
are better, I think, where solvent exposure is the primary hazard.

2.  I would always check were the closest safety shower or source of 
water is.  My guess is that you are likely often in locations where 
there is no real safety shower ... but knowing where the nearest 
restroom, running garden hose, etc would always be high on my list. It's 
probably worth mention that to your host as a precondition to your 
inspection.

3.   While others may have their favorites, we like SpilFyter Chemical 
Classifier strips that have several patches that can detect pH, 
fluoride, oxidizer, and a few more things.  When you are less certain of 
the chemical, the strips that can detect more things are useful.

4. I think that Calcium Gluconate typically comes in tubes that are 
larger than you can get through TSA.  As a result, I'd pre-fill two or 
three smaller plastic squeeze bottles so that you can get it through 
TSA.  I would also consider pre-shipping any other supplies to your 
destination.

5. How about a cartridge respirator and a set of cartridges for 
solvents, particles, etc?

6. For a measure of neutralization of surfaces, having some calcium 
carbonate crystals that could be mixed into a dilute solution is 
probably not a bad idea.  If I am not mistaken, most professional decon 
teams use calcium carbonate solution for anything that might have been 
exposed to HF or fluoride-bearing solutions such as implanter source 
boxes that have BF3 "crusty stuff" in them.

7.  Some form of good eye protection against unexpected splashes is 
important too.  Note: while somewhat bulky, a full face respirator would 
give you good eye protection in addition to fume protection.

Those are some of the things that I would want to have with me if I were 
about to do battle with a piece of equipment of unknown provenance.  I 
am confident, however, that some of the others on this list will have 
more to add.

Good luck,

John



On 6/24/2014 1:31 AM, Stephen Howe wrote:
> Dear Lab Network members,
>
> I would be interested in getting the network's suggestions regarding the
> following topic.
>
> As the owner and founder of Fabsurplus.com, a broker and reseller of
> used semiconductor manufacturing equipment, I spend around half of my
> time inspecting a wide selection of process equipment that has been in
> contact with a very wide range of chemicals.
>
> The machines inspected include CVD and PVD equipment, solvent and acid
> wet benches, pumps, implant equipment and lithography equipment.
>
> The equipment is typically "decontaminated" before we get to it.
> Sometimes, we get a decontamination certificate and MSDS sheets with the
> tool. This is very frequently a legal obligation prior to removal of the
> equipment from the factory.
>
> The precautions I adopt during inspection are:-
>
> 1. Check for presence of decontamination certificates and MSDS.
> 2. Wear some kind of disposable protective gloves during the inspection.
> 3. Remain aware of the potentially hazardous nature of any residues or
> fluids encountered during equipment inspections.
> 4. In the case any fluid is found, I check the pH of the fluid using
> indicator paper.
> In the case the indicator paper shows acid, decontamination procedures
> are followed.
> 5. Following inspection, gloves are removed and disposed of , and then I
> am always careful to thoroughly wash my hands.
>
> I would further comment that I have discovered around a pint of
> concentrated HF remaining in the machines I was inspecting on 2
> occasions in the last 15 years, and other acids on one occasion.
>
> I am also concerned that HF may leach into the plastic of the equipment
> we come into contact with.
> Furthermore, we are now exposed to a new hazard from possible residual
> gases from excimer lasers used in photolithography.
>
> I have noted that in the event of leaks of HF occuring during the
> machine's use, the steel surfaces of the machines in question -
> typically inside the gas boxes, chamber outer parts - can have a floured
> or stained appearance.
> I wonder if lab network members can advise on any precautions necessary
> for the handling and decontamination of such discolored or floured
> surfaces ?
>
> I often travel around the world to do equipment inspections, and end up
> doing the inspections armed with a flashlight in a warehouse.
> Very often the warehouses were I do the inspection have no first aid kit
> for the treatment of HF exposure and also no kit for the detection and
> cleanup of acid spills.
>
> As such I was thinking of carrying with me a small , emergency kit.
> In that kit I was thinking of including:-
>
> 1. Litmus paper
> 2. HF paper
> 3. A tube of Calcium Gluconate Gel
> 4. Disposable overalls
> 5. Gloves suitable for applying the Calcium Gluconate gel to any
> exposure sufferer.
>
> I need to get though airport security and customs with the minimum of
> fuss.
>
> Given the extremely wide assortment of machines we at Fabsurplus.com
> inspect, can anyone suggest items I could do with in my "emergency
> kit" ?
> Can anyone suggest quantities of the items I am going to be able to get
> through airport security without having a huge hassle ?
> Can anyone suggest any procedures or experiences which might help me get
> a kit like this through international customs and airport security with
> the minimum of fuss?
>
> Thanks very much in anticipation for your responses.
>
> Yours sincerely,
>
> Stephen Howe
> Company Owner
> SDI Fabsurplus Group
>
>   +1 830 388 1071 (Mobile)
> +39 335 710 7756 (Italy Mobile)
> Skype: Stephencshowe
> email: info at fabsurplus.com
>
> WWW.FABSURPLUS.COM
> Japan-Italy-Ireland-USA
>
> Facebook: www.facebook.com/fabsurplus
> Twitter: http://twitter.com/fabsurplus
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>
> Japan-Italy-Ireland-USA
>
>
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